Next generation secondary electron detector with energy analysis capability for SEM
نویسندگان
چکیده
منابع مشابه
SEM Image Observation Using an Electron Energy and Electron Take-off Angle Filtered Detector
Scanning electron microscopes (SEMs) are usually equipped with two types of detectors: secondary and backscattered electron detectors. The former produces secondary electron images (SEI) rich in topographic information[1, 2], whereas the latter produces backscattered electron images (BEI) rich in composition information[3]. Recently, however, a few other detectors have been installed in additio...
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ژورنال
عنوان ژورنال: Journal of Microscopy
سال: 2020
ISSN: 0022-2720,1365-2818
DOI: 10.1111/jmi.12867